首页> 外国专利> A METHOD OF MANUFACTURING A STAMPER FOR PRODUCING OPTICAL DISCS, A STAMPER THUS OBTAINED AND AN OPTICAL DISC OBTAINED BY USING SUCH A STAMPER

A METHOD OF MANUFACTURING A STAMPER FOR PRODUCING OPTICAL DISCS, A STAMPER THUS OBTAINED AND AN OPTICAL DISC OBTAINED BY USING SUCH A STAMPER

机译:一种制造用于制造光盘的压模的方法,一种由此获得的压模以及一种通过使用这种压模而获得的一种光盘

摘要

The present invention relates to a kind of CD-RW discsCD-RW productions for manufacturing pressing mold, construction including applying photoresist to pressuring template and above-mentioned application photoresist film, the construction includes continuous exposer, the photoresist film is developed and heats, wherein lithographic glue film is through finals is handled within the scope of deep UV before supplement step of exposure. The range of the supplement step of exposure of effective dose is 4.10-4 and 5.Between 10? -2 J/cm2. The invention additionally relates to a kind of CD master-disc and obtain through this pressing mold.
机译:本发明涉及一种用于制造压模的CD-RW光盘,一种CD-RW产品,其结构包括将光致抗蚀剂施加于加压模板和上述的施加光致抗蚀剂膜,该结构包括连续曝光器,使光致抗蚀剂膜显影并加热,光刻胶膜是通过增色剂在深紫外线的范围内处理后才进行补充曝光的步骤。有效剂量暴露的补充步骤范围是4.10-4和5。在10? -2焦耳/平方厘米。本发明还涉及一种通过该压模获得的CD母盘。

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