MANUFACTURING METHOD OF A-AXIS ORIENTED HIGH TC SUPERCONDUCTING THIN FILM

摘要

The present invention relates to a method for manufacturing a YBa ₂ CuO _7-X high-Tc superconducting thin film using a pulsed laser, wherein a-axis oriented YBa ₂ CuO _7-X superconducting thin film is deposited on a LaSrGaO ₄ (100) single crystal substrate by a pulse- And was modified by a deposition method. In the present invention, the a-axis oriented YBa ₂ CuO ₇ -x superconducting thin film was deposited at a substrate temperature between 700 ° C and 800 ° C and under an oxygen pressure condition maintained between 100mTorr and 300mTorr. In particular, the pulse laser was irradiated with an energy density of 1 J / cm 2 on the target surface, and the repetition rate was maintained at a high repetition rate between 10 Hz and 100 Hz.