DIFFUSION FURNACE PROCESSING TEMPERATURE CONTROL DEVICE OF DIFFUSION INSTALLATION

摘要

Purpose: the diffusion furnace treatment temperature control equipment for spreading installation is arranged to realize the evenness of wall thickness for the layer stored on through the chip for equably controlling temperature in a pipe. Construction: the diffusion furnace treatment temperature control equipment for spreading installation includes the multiple temperature sensing devices being mounted on the lower wafer region in many regions for being divided into the temperature of the measurement to each region, one controller, it creates compensation adjustment value, is used for the temperature value of the analysis of control area and controls signal lamp intensity with respective group of a lamp driver.