PRODUCTION PROCESS OF LOW TEMPERATURE COFIRED CERAMIC ON METAL(LTCC-M) BASE PLATE WITH FLAT SURFACE

摘要

PURPOSE: A production process of a LTCC-M base plate is provided wherein a low temperature fired ceramic is attached to the both side of a metal base to minimize a camber and controls the change of a camber in the post-firing process so that a flip-chip is easily combined with the LTCC-M base plate. CONSTITUTION: A production process is as follows: (1) a first step which prepares the metal and multiple LTCC green tapes independently; (2) a second which prepares a first and a second green tape piled body on the basis of the LTCC green tapes in (1); (3) a third which attaches the first and the second green tape piled body to the upper and lower part of the metal base respectively and presses to form the pressed body; (4) a fourth which cofires the pressed body to form a small cofired LTCC-M body; (5) a fifth which polishes both ceramic surfaces of the cofired LTCC-M base plate; and (6) a sixth which forms a circuit pattern on the polished ceramic surface to complete the base plate.