NOX GAS SENSOR USING WO3 SENSING LAYER AND ITS MANUFACTURING METHOD

摘要

The present invention provides a platinum thin film electrode formed in a predetermined pattern on the front surface of the thin film deposition alumina substrate, in order to provide a low-cost small high-sensitivity NO _x gas sensing element applicable to the emission gas measurement of the vehicle; A palladium-silver thick film heater formed on the back side of the alumina substrate; A conductive wire connected to the electrode and the heater; A tungsten oxide thin film for detecting NO _x gas deposited on a front surface of the substrate on which the electrode is formed; A NiO catalyst layer thin film deposited on the front surface of the tungsten oxide thin film at a thickness of 1 to 100 GPa; And a high temperature alumina adhesive coated on the back surface of the substrate on which the heater is formed to insulate and insulate the substrate, and provides a NO _x gas sensing device using a WO ₃ sensing film and a method of manufacturing the sensing device.