ANALYSIS METHOD FOR ION-INJECTED SAMPLE USING PHOTO-THERMAL TECHNIQUE AND RECORDING MEDIA FOR PERFORMANCE PROGRAM THEREOF

摘要

PURPOSE: A method for evaluating an ion injection sample using photothermal technology and recoding media for storing program therefor are provided to perform accurately the management of processes by converting a thermal wave parameter so that the relation of the measurement signal and the quantity of dose be in one-to-one ratio. CONSTITUTION: A complex converting coefficient of the quantity of ion dose within an evaluation range and the trace of each direction position in a complex plane for the complex converting coefficient are obtained(S8,S10). The distance of movement in the trace is obtained by the increment of the quantity of the ion dose. A value corresponding to the minimal condition of the evaluation range is set, and adding the value to the distance of movement sets the corresponding dose quantity(S12).