Wafer distance sensing device of semiconductor wafer transfer robot

摘要

The present invention relates to a wafer distance sensing device of a semiconductor wafer transfer robot. In the case where the positions of the wafers loaded in the cassette are unevenly disposed due to external impacts, the robot arm is used even though the wafer positions are not constant. Since the position to pick up the wafer and the distance to leave the wafer on the stage are always input by the encoder constantly, the position of the wafer seated on the stage is deviated from the desired position by the state of being removed from the cassette. In the case of proceeding to cause a process defect, the present invention is a transfer robot for adsorption fixed to the wafer loaded in the cassette to be seated on the upper surface of the stage, the distance between the wafer and the transfer robot and one side of the stage, respectively By attaching a distance sensor to detect , Is when the position of the wafer to be loaded into the cassette leaving be repeated disregarding the departure position of the wafer operation can solve the problems of the prior art that causes the displacement and the resulting failure of the process, the wafer is placed on the stage.