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X-ray analytical device for nondestructive testing of powder and liquid specimens; has graded multilayer Bragg reflector with specific characteristics

机译:X射线分析设备,用于粉末和液体样品的无损检测;已分级了具有特定特性的多层布拉格反射器

摘要

The device has a paraboloidal graded multilayer Bragg reflector (5) with layers applied to a concave surface of a substrate. The maximum form deviation, ripple and roughness, the angle of incidence of the X-ray beam (7) and the period thickness (d) of the reflector coating of the surface are specified The device has an X-ray source (6) and detector (10) and devices (14,15) to shape or limit the X-ray beam (7). A curved multilayer Bragg reflector (5) between the source and detector has a periodically repeating series of layers having different refractive indices. The period thickness varies continuously in the x-direction. The Bragg reflector is curved so that it forms a partial parabolic surface, in which the focal line or source of the X-ray source falls, so that it reflects a parallel X-ray beam. The reflector layers are vapor-deposited, sputtered or grown epitaxially onto a concave parabolic substrate.. An Independent claim is included for a curved multilayer Bragg reflector for incorporation in the device.
机译:该装置具有抛物面渐变的多层布拉格反射器(5),其层被施加到基板的凹面。规定了最大形式偏差,波纹和粗糙度,X射线束的入射角(7)以及表面反射涂层的周期厚度(d)。设备具有X射线源(6)和探测器(10)和设备(14,15)来成形或限制X射线束(7)。源和检测器之间的弯曲多层布拉格反射器(5)具有周期性重复的一系列折射率不同的层。周期厚度在x方向上连续变化。布拉格反射器是弯曲的,从而形成部分抛物线形表面,X射线源的焦线或源落在其中,从而反射了平行的X射线束。将反射器层气相沉积,溅射或外延生长在凹的抛物线形基板上。独立权利要求包括用于结合在装置中的弯曲多层布拉格反射器。

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