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Sample stage positioner offering lift and tilt down to picometer range under low temperatures comprises metal bellows containing expansible medium and electrical heater
Sample stage positioner offering lift and tilt down to picometer range under low temperatures comprises metal bellows containing expansible medium and electrical heater
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机译:样品台定位器在低温下可提起并向下倾斜至皮米级范围,包括金属波纹管,包含可膨胀介质和电加热器
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摘要
Each unit (1) of the positioner includes a thermoelectric lifting device (2). The overall state of the working medium (6) contained is temperature-dependent. A controlled electrical heater (8) extends into the medium.
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