首页> 外国专利> Application of a scratch resistant coating and an antireflective system onto a plastic substrate, in particular spectacle lenses by consecutive plasma and sputtering methods

Application of a scratch resistant coating and an antireflective system onto a plastic substrate, in particular spectacle lenses by consecutive plasma and sputtering methods

机译:通过连续的等离子和溅射方法在塑料基材(尤其是眼镜镜片)上施加防刮擦涂层和抗反射系统

摘要

For creating the scratch resistant layer a plasma is produced in a stimulating gas by a chemical vapor deposition (CVD) method and the gas fed via a tube (9) to the plastic substrate (7) in a vacuum chamber (1) containing a structure forming gas. A gas flow sputtering source (12,13) is then used to form the high refractive layer or layers of the antireflective system layers system. An Independent claim is made for the process equipment with separate plasma deposition (1) and gas flow sputtering (2) chambers and a transporting device (3), preferably a rotating plate, for moving the plastic substrate (7,8) from one chamber to the other.
机译:为了产生耐刮擦层,通过化学气相沉积(CVD)法在刺激性气体中产生等离子体,并且该气体通过管(9)在具有结构的真空室(1)中馈送到塑料基板(7)。形成气体。然后使用气流溅射源(12,13)来形成抗反射系统层系统的一个或多个高折射层。对于具有单独的等离子体沉积室(1)和气流溅射室(2)以及用于将塑料基材(7,8)从一个腔室中移出的传输装置(3)(最好是旋转板)的处理设备提出了独立权利要求。到另一个。

著录项

  • 公开/公告号DE19834314A1

    专利类型

  • 公开/公告日2000-02-03

    原文格式PDF

  • 申请/专利权人 LEYBOLD SYSTEMS GMBH;

    申请/专利号DE1998134314

  • 发明设计人 GRUENWALD HEINRICH;LIEHR MICHAEL;

    申请日1998-07-30

  • 分类号C23C16/44;C23C14/34;

  • 国家 DE

  • 入库时间 2022-08-22 01:42:43

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