Method to project periodical intensity distribution; involves generating binary amplitude mark where each period can be decomposed into rectangles whose with corresponds to period

摘要

The method involves using a binary amplitude mask that is structured so that each period can be decomposed into a sufficiently larger number of rectangles, the width of which corresponds to the period and the height of which lies within the decomposition border of the projection system. The mathematical graph of the intensity profile to be generated is characterized inside each rectangle and is made to be transparent or opaque after each application. Only determined harmonic components of the periodical arrangement of the rectangles in the height direction of the optical projection system are transferred.