首页> 外国专利> Arrangement for spatial image, measurement data acquisition, has first optical deflector directing beam to rotary second deflector deflecting beam to overlapping precession paths

Arrangement for spatial image, measurement data acquisition, has first optical deflector directing beam to rotary second deflector deflecting beam to overlapping precession paths

机译:用于空间图像的布置,测量数据的获取,具有第一光学偏转器将光束引导至旋转的第二偏转器偏转光束至重叠的进动路径

摘要

The arrangement has a rotary fitting with its rotation axis in the projection objective beam path and a first optical deflector directing the beam path to a rotary second deflector drive deflecting the beam path into two independent overlapping precession paths. An optoelectronic device has a light transmitter and receiver, whose light paths pass to a common main path via a beam divider, connected to control and evaluation electronics. The arrangement has a driven rotary fitting (6) with its rotation axis (18) in the beam path of a projection objective and with a first optical deflector directing the beam path to a second deflector connected to the shaft of a second rotary drive in the fitting so that the beam path is deflected into two mutually independent overlapping precession paths. An optoelectronic functional unit has a light transmitter and receiver, whose light paths pass to a common main path via a beam divider, and is connected to control and evaluation electronics (15) also for the rotary drives.
机译:该装置具有旋转配件,其旋转轴位于投影物镜光束路径中,并且第一光学偏转器将光束路径引导至旋转的第二偏转器驱动器,该第二偏转器驱动器将光束路径偏转为两个独立的重叠进动路径。光电设备具有一个光发射器和一个光接收器,它们的光路通过分束器传输到一条公共主路径,并与控制和评估电子设备相连。该装置具有从动旋转配件(6),其旋转轴(18)位于投影物镜的光路中,并且第一光学偏转器将光路引导至连接至第二旋转驱动器轴的第二偏转器。装配,使光束路径偏转为两个相互独立的重叠进动路径。光电功能单元具有一个光发射器和一个接收器,它们的光路通过一个分束器到达一条公共的主路,并与同样用于旋转驱动器的控制和评估电子装置(15)连接。

著录项

  • 公开/公告号DE19916305A1

    专利类型

  • 公开/公告日2000-10-19

    原文格式PDF

  • 申请/专利权人 CLAUS ULRICH;

    申请/专利号DE1999116305

  • 发明设计人 CLAUS ULRICH;

    申请日1999-04-12

  • 分类号G01C11/02;

  • 国家 DE

  • 入库时间 2022-08-22 01:42:11

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