Method for high resolution interferential measurement of the spacing to a reflector in which case a light receiver produces a signal which is evaluated by a signal processing unit, e.g. for digital scales

摘要

The method is for high resolution interferential measurement of the spacing to a reflector whose stroke is a measure for the value initiating the stroke, through photo diode (FD) elements consisting of a light transmitter and light receiver, the signals produced being evaluated in signal processing electronics. The light transmitter is integrated in a photo diode array and is on the front side of a transparent plate, preferably glass. An LED or diode laser is integrated into the radiation sensor array on a silicon chip (Ch). Light from the LED produces reflected light interference by a partial metallized reverse side of the glass plate and reflector (S), and the photo diode array receives bright/dark cycles as a measure of the reflector position. An Independent claim is included for a measurement device implementing the above method.