Device for removing dust, smaller than 20 mum, from precision apparatus

摘要

The device (1) has an air jetting device (5) for jetting air under pressure from air nozzles (15) towards the assembly (2) to blow away the dust. The air jetting device, which ionizes the dust, is adapted to jet air at a pressure which varies with time. A sucking device (6), with an electrical suction motor (6a) and an electrostatic filter (6b), sucks the dust blown away by the air jetting device, has a suction opening (11) positioned below the assembly. The device has a dust removing chamber (4) for isolating the assembly from the outside, an inlet door (7) opened and closed when the assembly is conveyed into the dust removing chamber, an outlet door (8) opened and closed when the assembly is conveyed out of the dust removing chamber and a conveying device (3a,3b) for conveying the assembly into and then out of the dust removing chamber.