Continuous on-line thin film characterization by combined Raman spectroscopy and reflectometry, offers insight into e.g. plasma-induced surface polymerization by revealing resultant physical and chemical changes in product or sample

摘要

In this apparatus, components for reflectometric measurement (3-14) are attached to components for Raman spectroscopic measurement. The source of reflected light (3-9) is directed onto the same sample zone, as the Raman excitation. Preferred features: Reflectometric measurements are taken by photometry and/or ellipsometry. A multimode optical fiber (22) divides Raman excitation energy homogeneously. Fiber diameter is suitably matched to the area of the sample to be illuminated; the fiber itself being interchangeable. Several fibers illuminate the sample over a zone, the light being subsequently focused onto the slit aperture of a spectrometer. Optical fibers can be used to match the area of Raman excitation, to that analyzed by photometry. Reflectometric measurement equipment, is suitable for modulated reflectrometry. The modulation is optical and/or electrical. It is provided by the Raman excitation source. The reflectometric source is coupled to the rest of the apparatus by an optical fiber. At least one of the Raman- and reflectometric receivers is connected to the rest of the apparatus by an optical fiber.