LIQUID DISPENSING SYSTEM AND USE THEREOF FOR DISTRIBUTING ULTRA-PURE LIQUID

摘要

The liquid to be dispensed starts from a reservoir (3A, 3B) maintained under a first overpressure P1, from where it is transferred to an intermediate storage tank (11) maintained under a predetermined intermediate pressure P2 P1. Downstream of this tank are connected in parallel a plurality of small volume distribution containers (12A, 12B), each of which can be put either at a distribution pressure P3 P2, or at a filling pressure P4 P2.Application to the distribution of ultra-pure chemicals for the microelectronics industry.