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Semiconductor factory automation system and method for monitoring operational failure of stocker
Semiconductor factory automation system and method for monitoring operational failure of stocker
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机译:半导体工厂自动化系统和用于监视储料器运行故障的方法
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摘要
A method for monitoring an operational failure of a stocker for use in a semiconductor factory automation system, wherein the stocker is divided into a plurality of operational parts, includes the steps of: a) generating stocker state information representing an operational state of the stocker in response to a stocker state signal issued from the stocker; b) inspecting the stocker state information to update the operational state of the stocker previously stored; c) generating a warning signal when at least one part contained in the stocker has failed; and d) generating an audiovisual warning sign in response to the warning signal. The method can effectively provide audiovisual warning signs when the stocker has failed.
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