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On-the-fly optical interference measurement device, machining device provided with the measurement device, and machine tool suited to on-the- fly optical measurement
On-the-fly optical interference measurement device, machining device provided with the measurement device, and machine tool suited to on-the- fly optical measurement
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机译:实时光学干涉测量装置,具有该测量装置的机械加工装置以及适合进行实时光学测量的机床
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摘要
In a machining device, a workpiece is laid on a working mechanism base and a lapping machine laid on the workpiece is operated to rotate. A lap liquid is supplied between the lapping machine and the workpiece. The lapping machine is provided with a plurality of holes as measurement windows. Above the workpiece, an interferometer is disposed on the opposite side of the lapping machine from the workpiece. The interferometer detects interference fringes on a machined surface of the workpiece through the measurement windows. Based on detection results, the rotation of the lapping machine and the position of the workpiece are controlled.
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