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Metal ion reduction in novolak resin solution using an anion exchange resin
Metal ion reduction in novolak resin solution using an anion exchange resin
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机译:使用阴离子交换树脂还原线型酚醛清漆树脂溶液中的金属离子
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摘要
The present invention provides methods for producing water insoluble, aqueous alkali soluble novolak resins having a very low level of metal ions, utilizing a specially treated anion exchange resin. A method is also provided for producing photoresist composition having a very low level of metal ions from such novolak resins and for producing semiconductor devices using such photoresist compositions.
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