Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure using target indexing

摘要

An apparatus and method for depositing plural layers of materials on a substrate within a single vacuum chamber allows high- throughput deposition of structures such as those for GMR and MRAM application. An indexing mechanism aligns a substrate with each of plural targets according to the sequence of the layers in the structure. Each target deposits material using a static physical-vapor deposition technique. A shutter can be interposed between a target and a substrate to block the deposition process for improved deposition control. The shutter can also preclean a target or the substrate and can also be used for mechanical chopping of the deposition process. In alternative embodiments, plural substrates may be aligned sequentially with plural targets to allow simultaneous deposition of plural structures within the single vacuum chamber. A monitoring and control device can be wed to optimize equipment state, process state, and wafer state parameters by sensing each respective state during or after the deposition process. In another alternative embodiment, an additional indexing mechanism can be associated with one or more targets to move the indexing targets positioned on an indexing target plane into a position aligned with the substrate. The indexing target plane is formed within the vacuum chamber and substantially parallel to a fixed target plane in order to reduce the overall PVD equipment footprint for a given number of PVD targets.