Cryogenic vacuum pump system having a cryopanel and a heat absorbing unit

摘要

A cryogenic vacuum pump system in which a pump out system such as a cryotrap 13, with which gas is subjected to vacuum pump out by condensing or adsorbing said gas on a cryopanel which has been cooled to a very low temperature, is used, and a radiant heat absorbing baffle 18 which has been subjected to a blackening surface treatment is established up stream of, or around, the cryopanel 15. The radiant heat which is absorbed by the radiant heat absorbing baffle is released outside the chamber. The total thermal load on such a cryotrap is greatly reduced.