Method of forming a stress relieved amorphous tetrahedrally- coordinated carbon film

摘要

A stress-relieved amorphous-diamond film is formed by depositing an amorphous diamond film with specific atomic structure and bonding on to a substrate, and annealing the film at sufficiently high temperature to relieve the compressive stress in said film without significantly softening said film. The maximum annealing temperature is preferably on the order of 650° C., a much lower value than is expected from the annealing behavior of other materials.