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Schottky barrier detectors for visible-blind ultraviolet detection
Schottky barrier detectors for visible-blind ultraviolet detection
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机译:肖特基势垒探测器,用于可见盲紫外探测
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摘要
The invention concerns the fabrication and characterization of vertical geometry transparent Schottky barrier ultraviolet detectors based on n.sup.- /n.sup.+ -GaN and AlGaN structures grown over sapphire substrates. Mesa geometry devices of different active areas were fabricated and characterized for spectral responsitivity, speed and noise characteristics. The invention also concerns the fabrication and characterization of an 8×8 Schottky barrier photodiode array on GaN with a pixel size of 200 &mgr;m by 200 &mgr;m.
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机译:本发明涉及基于在蓝宝石衬底上生长的n-/ n + -GaN和AlGaN结构的垂直几何透明肖特基势垒紫外检测器的制造和表征。制造了不同活动区域的台面几何器件,并对其光谱响应度,速度和噪声特性进行了表征。本发明还涉及在GaN上具有200μm×200μm的像素尺寸的8×8肖特基势垒光电二极管阵列的制造和表征。
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