Process and diffusion baffle to modulate the cross sectional distribution of flow rate and deposition rate

摘要

Process and apparatus controlling the cross-sectional flow distribution within a flowing stream such as a copper flux in an electrolytic copper deposition process. The flow distribution is controlled by a baffle comprised of two plates overlying one another, each having a set of openings, wherein the openings in the two plates generally correspond to one another but are slightly offset therefrom or varied in size in a non-uniform way along the radius of the plates such as to effect a modification of the uniformity or non-uniformity of the velocity flow rates across the cross section of the flowing stream in which the baffle is interposed.