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Robot having a centering and flat finding means
Robot having a centering and flat finding means
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机译:具有定心和找平装置的机器人
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摘要
The present invention is a wafer handling robot which does not require a second mechanism for performing the task of pre-alignment. The robot uses the moving elements of the wafer handling robot which perform the wafer handling tasks to perform the tasks of centering and notch or flat finding of a wafer.
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