The field observation of the electronic property with elliptically polarized light modulo

摘要

(57) Abstract With the modulation of internal electric field of the material while (for example, in the midst of production) processing which uses eripuso technology in order to research the change which was induced in eripusosupekutoru of the material, the manner which the sample (4) monitors material parameter (for example, electronic property of semiconductor), judges the parameter of the material which has interest from those changes. Means of modulation, can be source of the electromagnetic emission for example like the laser (8). The ellipsometer which is used can include the array of the photodetector. With this process, while investigating it is possible to do real-time monitoring of process.