PHASE ADJUSTING MASK FOR ARRAY WAVEGUIDE GRATING AND MANUFACTURING METHOD FOR ARRAY WAVEGUIDE GRATING USING IT

摘要

PROBLEM TO BE SOLVED: To simultaneously adjust phase errors of each waveguide in an array waveguide grating.;SOLUTION: Although the length of each array waveguide in the array waveguide grating 2 is basically increased at a fixed pitch, the phase errors actually exist in each array waveguide after manufacture. Thereupon, each waveguide is irradiated with ultraviolet laser beams 10 via the window 9 of a phase adjusting mask 11, and the phase of each waveguide is controlled by the use of the change of ultraviolet ray inducing refractive index. Moreover, since the window 9 is formed into the length corresponding to a phase every each waveguide the phase of all waveguides can be matched to a design value only by irradiating each waveguide with the ultraviolet laser beam 10 once.;COPYRIGHT: (C)2001,JPO