METHOD FOR MEASURING SPECTRAL INTENSITY DISTRIBUTION AND DEVICE FOR MEASURING SPECTRAL INTENSITY DISTRIBUTION

摘要

PROBLEM TO BE SOLVED: To measure the spectral intensity distribution of light irradiating a surface to be measured without using any expensive measuring instrument.;SOLUTION: This device is constituted with n (n is a natural number) light passage parts 14 having n kinds of known optical characteristic coefficients, respectively, and irradiated with light, s (s is a natural number) optical sensors 11 having s kinds of known spectral sensitivities, respectively, and detecting photoreceptive intensities of light passed through the passage parts 14, and a calculation part 13 for calculating m (m is a natural number) spectral intensities, as the spectral intensity distribution of the light, with respect to m kinds of wavelengths based on a linear relational equation holding between spectral intensity distribut ion of light and n×s photoreceptive intensities obtained by using the characteristic coefficients, the spectral sensitivities, and the s sensors 11.;COPYRIGHT: (C)2001,JPO