MANUFACTURE OF LIQUID EJECTION HEAD, LIQUID EJECTION HEAD, HEAD CARTRIDGE, LIQUID EJECTION RECORDER, MANUFACTURE OF SILICON PLATE AND SILICON PLATE

摘要

PROBLEM TO BE SOLVED: To manufacture a long-sized liquid ejection head having high reliability in the case where the liquid ejection head is manufactured by using an orifice plate made from silicon which is also a material of a device substrate. ;SOLUTION: An Al layer 22 to which patterning is applied is formed on a surface of a silicon substrate 21 whereby an orifice plate is formed. Dry etching is applied to the silicon substrate 21 by using Al layer 22 as a mask and then a hole 21a as a recess section having a depth greater than that of an ejection nozzle on the surface by 5-50 μm and a groove-like cutting line are formed to be disposed on positions corresponding to the ejection nozzle on the surface of the silicon substrate 21. Next, the rear face of the silicon substrate 21 is ground and abraded to thin the silicon substrate 21 and then the hole 21a is made to be a through-hole so that the ejection hole 3 on the silicon substrate 21 is formed and the silicon substrate 21 is divided into a plurality of orifice plates 16 by the cutting lines 21b. As a result, the orifice plate 16 having ejection hole 3 formed on the silicon substrate 21 is manufactured.;COPYRIGHT: (C)2001,JPO