Electric charge beam arrangement and process manner null for profile processing observation

摘要

PURPOSE: To work a transmission electron microscope sample in a specified position of a sample into a simple and more suitable form, and observe and analyze it in the site. ;CONSTITUTION: An ion optical system for emitting a converged ion beam 3 to a sample 4 from the transverse direction to the electron beam 7 of a transmission electron microscope is arranged, and a transmission type electron microscope sample is formed by ion beam etching. The secondary electrons by excitation of the beams 2, 7 are detected by a secondary electron detector 5 to confirm the working position, working form and section of the sample. The electron beam 7 transmitted by the sample 4 is detected by a transmitted electron detector 12 to observe a fine part. The X-ray by electron beam cooling is detected by an X-ray detector 10 to analyze the fine part.;COPYRIGHT: (C)1994,JPO&Japio