DEVELOPMENT PROCESSING DEVICE FOR MATERIAL HAVING PHOTOSENSITIVE RESIN COMPOSITION

摘要

PROBLEM TO BE SOLVED: To provide a development processing device for material having a photosensitive resin composition capable of lessening the amount of waste liquid while maintaining the development performance of a development processing liquid.;SOLUTION: This development processing device 10 includes an intermediate waste liquid tank 2 into which the overflow waste liquid from a developing bath 4 is introduced, an electrolytic cell 1 which electrolytically treats the liquid used for development introduced from the developing bath 4 and the overflow waste liquid introduced from the intermediate waste liquid tank 2. The electrolytic cell 1 includes a circulating mechanism consisting of a first route for circulating the liquid used for development between a cathode side of this electrolytic cell and the developing bath 4 and a second route for circulating the overflow waste liquid between an anode side of the electrolytic cell and the intermediate waste liquid tank 2.;COPYRIGHT: (C)2001,JPO