METHOD AND DEVICE FOR MEASURING THREE-DIMENSIONAL MAGNETIC FIELD DISTRIBUTION AND THREE-DIMENSIONAL ELECTRIC CURRENT DISTRIBUTION

摘要

PROBLEM TO BE SOLVED: To provide a method and device for easily measuring three-dimensional magnetic field distribution and three-dimensional electric current distribution of the inside of an object with high spatial resolution and high precision.;SOLUTION: The object 2 having magnetic field distribution is irradiated with electron wave, transmitted electron wave and reference electron wave are made to interfere with each other and and electron beam holography image 6 is formed and photographed. At this time, a large number of electron beam holography images 6 are photographed by repeating photographing while changing irradiation angle of the electron wave little by little by rotating the object 2. From a large number of electron beam holography image patterns, electron beam phases corresponding to positions and rotation angels of the electron beams are measured and three-dimensional magnetic field distribution and three- dimensional electric current distribution of the inside of the object are numerically measured from a large number of phase information.;COPYRIGHT: (C)2001,JPO