DEVICE FOR DECOMPOSITION OF COMPOUND WITH HIGH FREQUENCY PLASMA, METHOD FOR DECOMPOSITION OF COMPOUND AND SYSTEM FOR DECOMPOSITION OF COMPOUND

摘要

PROBLEM TO BE SOLVED: To provide a device for the decomposition of compounds by high-frequency plasma, a method for the decomposition of compounds and a system for the decomposition of compounds in which stable plasma can be maintained with low electric power and various kinds of objects to be treated can be decomposed.;SOLUTION: The device for the decomposition of compounds by high-frequency plasma by applying a magnetizing current on a high-frequency coil 5 wound around a discharge tube 2 to generate induced plasma in the discharge tube 2 and to decompose the object introduced into the discharge tube 2 is equipped with a straightening means (gap 100) to straighten and introduce the object and a discharge assistant into the discharge tube 2.;COPYRIGHT: (C)2001,JPO