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COLD-CATHODE FIELD-ELECTRON EMISSION ELEMENT AND ITS MANUFACTURING METHOD, AND COLD-CATHODE FIELD-ELECTRON EMISSION DISPLAY UNIT AND ITS MANUFACTURING METHOD
COLD-CATHODE FIELD-ELECTRON EMISSION ELEMENT AND ITS MANUFACTURING METHOD, AND COLD-CATHODE FIELD-ELECTRON EMISSION DISPLAY UNIT AND ITS MANUFACTURING METHOD
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机译:冷阴极场电子发射元件及其制造方法,冷阴极场电子发射显示器及其制造方法
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摘要
PROBLEM TO BE SOLVED: To provide a cold-cathode field-electron emission element not using a metal with high melting point and equipped with electron emitting electrode that can achieve an excelled electron emission efficiency and a long lifetime with a simple shape. ;SOLUTION: The cold-cathode field-electron emission element of this invention is equipped with (A) cathode electrode 13 formed on a support 10, (B) an insulation layer 15 formed on the support 10 including the cathode 13, (C) gate electrode 16 formed on the insulation layer 15, (D) an opening 18 penetrating the gate electrode 16 and inslating layer 15, and (E) an electron emitting electrode 21 composed of a (Sr, Ba, Ca)CO3 layer that is formed on the cathode 13 located at the bottom of the opening 18.;COPYRIGHT: (C)2001,JPO
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