Professional - buka - do

摘要

PURPOSE: To facilitate handling of probe card by preventing the number of connecting points from increasing even if the number of probes for power supply increases. ;CONSTITUTION: The probe card comprises first, second, third and fourth annular conductor layers 21, 22, 23, 24 for power supply formed, respectively, on the first and second main surfaces 1a, 1b of an insulating substrate, first and second interlayer wiring layers 31, 32 for connecting the first and second annular power supply conductor layers with the third and fourth annular power supply conductor layers, and first and second power supply connecting lines 41, 42 for connecting first and second power supply pads 4, 5 with first and second annular power supply conductor layers, respectively.;COPYRIGHT: (C)1994,JPO&Japio