APPARATUS AND METHOD FOR DETECTION OF SURFACE CHARACTERISTIC AND ELECTRIC CHARACTERISTIC BY SCANNING PROBE AND APPARATUS AND METHOD FOR DETECTION OF SURFACE CHARACTERISTIC AND ELECTRIC CHARACTERISTIC BY MULTIPROBE CONSTITUTED OF THEM AS WELL AS APPARATUS AND METHOD FOR OBSERVATION

摘要

PROBLEM TO BE SOLVED: To simplify the interconnection, the detection circuit and the like of a probe and a detecting system and to establish a method for the detection and observation of a surface characteristic and an electric characteristic by a multiprobe, by a method wherein a current which flows in a piezoresistance and a current which flows across a medium and a conductive probe are detected by a common current passage.;SOLUTION: The path of a current for an AFM flowing in a piezoresistance in order to detect the surface characteristic of a medium, and the path of a current for an STM flowing across the medium and a conductive probe in order to detect the electric characteristic of the medium, are constituted of the same path. A lever-type probe 201 is brought close to a sample 202 to be observed, and a force acts mutually by an atomic force or the like. When a scanning signal is generated by a scanning-signal generation part 207, a stage is driven to the in-plane direction of the sample to be observed, the probe 201 relatively scans the in-plane of the sample to be observed, and the piezoresistance is changed. A prescribed voltage is applied, and the probe 201 is brought close to the sample 202 to be observed by an approach control part 209 within a certain distance. Then, a tunnel current flows. On the basis of the current, the local electric state of the sample to be observed can be grasped.;COPYRIGHT: (C)2001,JPO