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METHOD AND DEVICE FOR DYNAMICALLY OBSERVING CHANGE IN CRYSTAL PARTICLE
METHOD AND DEVICE FOR DYNAMICALLY OBSERVING CHANGE IN CRYSTAL PARTICLE
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机译:动态观察晶体颗粒变化的方法和装置
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摘要
PROBLEM TO BE SOLVED: To observe the dynamic change in micro organization and a sample in a park shape by dynamically observing the change in a crystal particle in such state as heating and cooling with a secondary electron image or a reflection electron image from the sample where a condensation ion beam is applied. ;SOLUTION: The acceleration ion of a Ga ion source 1 scans a sample 5 by a deflection coil 2 after condensation. A sample surface is subjected to sputtering by the ion beam, and a secondary electron and a reflection electron being generated due to the collision of the ion against the sample 5 are detected by a secondary electron detector 3 and a reflection electron detector 4, respectively. A heating/cooling holder 6 for fixing the sample 5 can heat or cool the sample 5 indirectly up to 1,500°C. The secondary electron detector 3 that is located at the upper portion of the sample 5 is positioned at an area that is not subjected to direct sunlight in observation where temperature is equal to or more than 1,000°C since image quality deteriorates at 1,000°C or higher due to directly sunlight caused by the temperature increase of the sample, thus bending the secondary electron and capturing it by the gradient of an electric field. Then, the change in the crystal particle is dynamically observed during heating, cooling, or the like by the detected secondary electron image or the reflection electron image.;COPYRIGHT: (C)2000,JPO
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