CIRCUIT SIMULATION DEVICE, CIRCUIT SIMULATION METHOD, COMPUTER READABLE RECORDING MEDIUM HAVING CIRCUIT SIMULATION PROGRAM STORED THEREIN AND METHOD FOR MANUFACTURING CIRCUIT

摘要

PROBLEM TO BE SOLVED: To substantially improve the yield of a circuit manufacturing processing. ;SOLUTION: This device is provided with a means 114 for calculating deviation values from the design values of a gate length and a gate width by using information relating to a semiconductor device structure and electric characteristics for each semiconductor device, a means 115 for extracting a circuit parameter corresponding to drive-in diffusion length and diffusion width by using the deviation values for each semiconductor device, a means 116 for introducing the circuit parameter into the analysis model of the semiconductor device and calculating the other circuit parameter inside the analysis model for each of the semiconductor devices and a means 117 for executing circuit simulation by using the calculated circuit parameter and leading out circuit characteristics relating to each of the semiconductor devices.;COPYRIGHT: (C)2001,JPO