IMAGE FORMING DEVICE FOR ENERGY RESOLUTION AND ANGULAR RESOLUTION ELECTRON SPECTRAL DIFFRACTION, METHOD FOR IT, AND SPECTROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a method and device for image formation and a spectroscope capable of casting a particle beam having an energy distribution and angular distribution in a sensing device as image formation with the quality of image formation heightened through widening of the diffusion light image and improvement of the image resolution. ;SOLUTION: The present invention comprises a deflecting device 120 including deceleration lenses 121-124 to put particle beams 108 parallel substantially and make their 109 mutual distance corresponding to the angular distribution of particles, a sensing device 140, a filtrating device 130 installed between the deflecting device 120 and sensing device 140 and impressed with a potential for forming a cutoff electric field for filtrating the particles in terms of energy selection, and a stepped hole or inlet grid in axial symmetry provided in front of the deflecting device 120 on its sample side and put in ground potential in electrical insulation from the deflecting device 120.;COPYRIGHT: (C)2001,JPO