METHOD AND DEVICE FOR STRUCTURE INSPECTION ON LONG- PERIOD REGULAR STRUCTURE AND LONG-PERIOD REGULAR STRUCTURAL BODY

摘要

PROBLEM TO BE SOLVED: To provide a method and a device for inspecting an orientational direction of a material having a long-period regularity ranging from several nm to several hundreds nm in a short time.;SOLUTION: In this method and its device for evaluating long-period regularity of a sample, a process 1 and a process 2 are carried out, and long-period regularity of the sample is evaluated from a plurality of X-ray diffraction profiles provided by the processes 1, 2. In the process 1, a part or all of primary X-rays 2 radiated from a rectangular X-ray source 1 is incident on the surface of a measurement sample 5 arranged in parallel to the major axis of the X-ray source at an incident angle within 5°, and an X-ray intensity distribution of X-rays diffracted on the surface of the sample is measured with a diffraction angle 2 θ by means of a 0-demensional detector 8 or a one-dimensional detector for providing an X-ray diffraction profile. In the process 2, the measurement sample is turned by a predetermined angle within the measurement sample surface, and the process 1 is repeated once or more.;COPYRIGHT: (C)2001,JPO