NOVEL (METH)ACRYLIC ESTER, NOVEL NORBORNENE DERIVATIVE, AND NOVEL POLYMERS DERIVED ROM THEM

摘要

PROBLEM TO BE SOLVED: To obtain a polymer which can give a photoresist excellent in the ability to impart a high resolution, dry etching resistance, transparency, adhesion, etc., by using a (meth)acrylic ester having a specified structure and a norbornene derivative.;SOLUTION: Provided are a (meth)acrylic ester (A) represented by formula I, for example, 3-oxo-8-terpinyl (meth)acrylate and a norbornene derivative (B) represented by formula III or IV, for example, 3- oxoterpinyloxycarbonylnorbornene. Compound A is obtained by reacting a cyclic oxo tertiary alcohol with (meth)acryloyl chloride or (meth)acrylic anhydride. Compound B is produced by the Diels-Alder reaction of compound A with a cyclopentadiene compound. In the formulae, R1 and R2 are each a 1-20C alkyl, provided that they may be combined with each other to form a cyclic structure; R3 and R6 are each a 1-20C alkyl or hydrogen; R4, R5 and R7 are each a 1-20C alkyl; and X1 is methyl or hydrogen.;COPYRIGHT: (C)2000,JPO