POSTURE CONTROL SYSTEM FOR DISPLACEMENT DETECTOR, DISPLACEMENT DETECTOR, AND POSTURE CONTROL METHOD FOR DISPLACEMENT DETECTOR

摘要

PROBLEM TO BE SOLVED: To provide a posture control system by which more precise measured data can be obtained by making the posture of a moving part in a displacement detector become precisely a mechanical neutral position a displacement detector and a posture control method for a displacement detector, in which the mechanical neutral position of a moving part is made precise.;SOLUTION: In this posture control system 1, in which a moving part 25 is supported by support springs 26 in a gap in which a DC magnetic field is formed, and the posture of a displacement detector 2 which measures the displacement of the moving part is controlled, a mounting base 3, support parts 31 which are expanded and contracted freely, moving-part displacement means 25b, 41 by which the moving part is displaced to a prescribed displacement direction, stoppers 21, 27 which prevent the displacement at a prescribed amplitude of higher of the moving part, a displacement-signal detecting means 25a which detects a displacement signal caused by the displacement of the moving part up to the stoppers, a displacement- amount calculation means 42 which calculates a displacement amount is provided. Posture control means 43, 44, 45 which generate and output a posture control signal used to control the posture of the displacement detector, and a drive means which expands and contracts a support part are provided.;COPYRIGHT: (C)2000,JPO