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Manufacturing method of a cutting tool coated with al2o3, using the physical vapor deposition technique (pvd)

机译:使用物理气相沉积技术(pvd)涂覆有Al2o3的切削刀具的制造方法

摘要

B "METHOD OF MANUFACTURING A CUTTING TOOL COATED WITH AL ~ 2 ~ O ~ 3 ~, THROUGH THE STEAM PHYSICAL DEPOSITION (PVD) TECHNIQUE" D. The present invention relates to a process for producing a coated cutting tool, consisting of a coating and a substrate, in which at least one refractory layer consisting of sym -Al ~ 2 ~ O ~ 3 ~ is deposited by means of reactive magnetron crackle on a mobile vacuum substrate, through pulsed magnetron crackle in a mixture of a noble gas and a reactive gas, at a pulse frequency set at 10 to 100 kHz. Deposition takes place at a speed of at least 1 nm / s with reference to a stationary substrate, with an energy density over an average target magnetron time set to at least 10 W / cm ^ 2 ^. The substrate temperature is in the range of 400 to 700 ° C and the flow of particles that hit each individual substrate is cyclically interrupted.
机译:“通过蒸汽物理沉积(PVD)技术制造涂有Al〜2〜O〜3〜的切削刀具的方法” 。具有涂层的切削工具的制造方法技术领域本发明涉及一种由涂层和基底组成的涂层的切削工具的制造方法,其中通过反应磁控管沉积至少一个由 -Al〜2〜O〜3〜组成的耐火层。在惰性气体和反应性气体的混合物中,通过脉冲磁控管破裂,以10至100 kHz的脉冲频率在移动真空基板上破裂。相对于固定衬底,沉积以至少1 nm / s的速度进行,在平均目标磁控管时间内的能量密度设置为至少10 W / cm ^ 2 ^。基板温度在400到700°C的范围内,击中每个单独基板的粒子流会周期性中断。

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