Kapasitiv transduser med tilbakekopling ved elektrostatisk kraftpåvirkning, og fremgangsmåte for styring av profilen av dens aktive transduserelement

摘要

The invention is related to a capacitive transducer feedback-controlled by means of electrostatic force and a method for controlling said transducer. The transducer comprises a body part (8) supporting a dynamically moving transducing element sensitive to the variable being measured, said transducing element being, e.g., a diaphragm (9) or a reference mass (36) supported by a bending beam (37), said element further being at least on its surface electrically conductive to the end of forming a first electrode (9, 36) of the transducer, and the transducer further comprising at least two second, planar electrodes (5, 6) which are placed on the same side with regard to the transducing element (9, 37). According to the invention, the second electrodes (5, 6) have at least essentially equal effective areas to the end of measuring the profile of the transducing element (9, 37) and controlling the same to an exactly defined geometric state. IMAGE