ROTATEABLE RACK CIRCLE ROUND, SHAPED SLICE OBJECTS, IN PARTICULAR SEMICONDUCTOR WAFER OR substrates

摘要

The carrier (1) has an annular jet (8) concentric to its axis in its surface (3,5) which faces a semiconductor wafer (2), for providing a pressurised jet stream, directed radially for supporting the edge of the disc. The surface of the carrier facing the wafer has a stepped edge between the annular jet and the outer edge of the disc, allowing a treatment fluid (15) directed onto the top surface of the wafer to flow around the outer edge and over the peripheral edge region on the underside of the wafer.