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FEMTOSECOND LASER WRITING OF GLASS, INCLUDING BOROSILICATE, SULFIDE, AND LEAD GLASSES

机译:玻璃的激光激光刻写,包括硼硅酸盐,硫化物和铅玻璃

摘要

A method of writing a pattern, such as a waveguide, in a bulk glass substrate (4). The bulk glass substrate (4) can be formed from, for example, borosilicate or sulfide or lead glass. A pulsed laser (1) is focused (3) within the substrate (4) while the focus (3) is translated relative to the substrate along a scan path (6, 7 and 8) at a scan speed effective to induce an increase in the refractive index of the material along the scan path. Substantially no laser induced physical damage of the material is incurred along the scan path. Various optical devices can be made using this method.
机译:一种在大块玻璃基板(4)中写入诸如波导之类的图案的方法。块状玻璃基板(4)可以由例如硼硅酸盐或硫化物或铅玻璃形成。脉冲激光(1)在基板(4)内聚焦(3),而焦点(3)沿扫描路径(6、7和8)相对于基板平移,其扫描速度有效地导致了激光强度的增加。材料沿扫描路径的折射率。沿扫描路径基本上不会引起材料的激光诱导的物理损坏。使用这种方法可以制造各种光学器件。

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