A micro inertial measurement sensor comprises, metal case (1), first circuit board (2), second circuit board (4), third circuit board (7), control circuit board (9), X-axis angular rate detecting unit (21), first front-end circuit (23), Y-axis angular rate detecting unit (41), second front-end circuit (43), Z-axis angular rate detecting unit (71), third front-end circuit (73), three dither motion control circuits provided on ASIC chip (92), wherein an oscillator is provided for reference pick-off signals on the X-axis angular rate detecting unit (21), the Y-axis angular rate detecting unit (41), the Z-axis angular rate detecting unit (71), the angle signal loop circuit and the dither motion control circuit and three dither motion control processing modules which run in DSP chip (91) are connected on control circuit (9) for the first, second and third circuit boards (2, 4, 7), respectively.
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