NON-SINGLE CRYSTAL FILM, SUBSTRATE WITH NON-SINGLE CRYSTAL FILM, METHOD AND APPARATUS FOR PRODUCING THE SAME, METHOD AND APPARATUS FOR INSPECTING THE SAME, THIN FILM TRANSISTOR, THIN FILM TRANSISTOR ARRAY AND IMAGE DISPLAY USING IT

摘要

A method for producing non-single crystal film in which the periodicity of grain size is enhanced while suppressing variation thereof. The production method comprises a first step for optimizing laser irradiation by monitoring a non-single crystal film with diffracted light after formation of the film, and a second step for performing laser irradiation while cooling a substrate.