Protective inorganic and dlc coatings and method for making same at or close to room temperature

摘要

A method of applying a thin film protective coating to an object comprising the steps of:flowing a reactive gas past an object (24) supported within a chamber (10), the gas including one or more components for forming an inorganic or DLC coating on the object; andapplying a plasma producing energy to the reactive gas, at or near room temperature, to cause an amorphous inorganic or DLC thin film protective coating to be formed on the object by chemical vapor deposition..