METHOD AND APPARATUS FOR AN IMPROVED SINGLE POLE DOUBLE THROW MICRO-ELECTRICAL MECHANICAL SWITCH

摘要

A single pole, double throw micro-electromechanical (MEM) switch. The inventive switch includes a first contact providing a first terminal of the switch. A second contact provides a second terminal of said switch. A cantilever beam provides a third terminal of the switch. The inventive switch includes a system for electrostatically pushing or pulling the beam to disengage the first contact and engage the second contact. In an illustrative implementation, the system for electrostatically operating the switch includes a first charge storage structure on the beam, a second charge storage structure on the switch, and an electrical supply for creating an electrical charge on the first and the second charge storage structures. The first and second charge storage structures are effective to create a force of repulsion therebetween on the application of an electrical charge thereto. The "pull" electrostatic force closes the MEM switch. The "push" force aids in opening the switch. The "push" capability is the result of the use of like (same polarity) electrostatic charges on the control surfaces. The like charges provide an electrostatic repulsion force during the switch opening process.